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  <titleInfo>
    <title>Inertial MEMS</title>
    <subTitle>principles and practice</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Kempe, Volker</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
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  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">enk</placeTerm>
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    <place>
      <placeTerm type="text">Cambridge</placeTerm>
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    <publisher>Cambridge University Press</publisher>
    <dateIssued>2011</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xiv, 475 p. : ill. (some col.) ; 26 cm.</extent>
  </physicalDescription>
  <tableOfContents>Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index</tableOfContents>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">Volker Kempe</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Microelectromechanical systems</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Inertial navigation systems</topic>
  </subject>
  <subject authority="lcsh">
    <topic>BioMEMS</topic>
  </subject>
  <identifier type="isbn">9780521766586 (hbk.)</identifier>
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    <recordCreationDate encoding="marc">120612</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251125093605.0</recordChangeDate>
    <recordIdentifier source="KUKTEM">vtls000061732</recordIdentifier>
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