TY  - BOOK
AU  - Kempe,Volker
TI  - Inertial MEMS: principles and practice 
SN  - 9780521766586 (hbk.)
PY  - 2011///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Microelectromechanical systems
KW  - Inertial navigation systems
KW  - BioMEMS
N1  - Includes bibliographical references and index; Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index
ER  -