TY  - BOOK
AU  - Sandhu,G.S.
ED  - Advanced Metallization Conference
ED  - Materials Research Society
TI  - Advanced Metallization Conference in 1998 (AMC 1998): proceedings of the conference held October 6-8, 1998, in Colorado Springs, Colorado; parallel session was held September 3-4, 1998 in Tokyo, Japan 
SN  - 9781558994843
PY  - 1999///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Thin films
KW  - Metallizing
KW  - Congresse
ER  -