Materials issues and modeling for device nanofabrication :  symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. / 
editors by Lhadi Merhari ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2000 
 - xiii, 340 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 584 .
 - Materials Research Society symposium proceedings .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558994928 1558994920 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction--Congresses<br/>Nanotechnology--Congresses<br/>Integrated circuits--Materials--Congresses<br/>Molecular electronics--Congresses<br/>Microlithography--Congresses