01040nam a2200253 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245017900120260005700299300003500356490006300391504005000454650006100504650003100565650004700596650003800643650003300681700001900714830005300733vtls000061945KUKTEM20251125093616.0120614t2000    paua   f b    001 0 eng d  a9781558994928  a1558994920  aUMP00aMaterials issues and modeling for device nanofabrication :bsymposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /ceditors by Lhadi Merhari ... [et al.]  aWarrendale, PA :bMaterials Research Society,cc2000  axiii, 340 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 584  aIncludes bibliographical references and index 0aIntegrated circuitsxDesign and constructionvCongresses 0aNanotechnologyxCongresses 0aIntegrated circuitsxMaterialsvCongresses 0aMolecular electronicsvCongresses 0aMicrolithographyvCongresses1 aMerhari, Lhadi 0aMaterials Research Society symposium proceedings