TY  - BOOK
AU  - Merhari,Lhadi
TI  - Materials issues and modeling for device nanofabrication: symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558994928
PY  - 2000///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Design and construction
KW  - Congresses
KW  - Nanotechnology
KW  - Materials
KW  - Molecular electronics
KW  - Microlithography
N1  - Includes bibliographical references and index
ER  -