Microelectromechanical systems, materials and devices :  symposium held November 26-28, 2007, Boston, Massachusetts, USA / 
editors by David A. LaVan ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2008 
 - xiv, 325 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 1052 .
 - Materials Research Society symposium proceedings .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558999909 1558999906 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Materials--Congresses<br/>Microelectromechanical systems--Congresses