00888nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245016700120260005700287300003400344490006400378504005000442650005800492650004700550700002000597830005300617vtls000062121KUKTEM20251125093616.0120618t2008    paua   f b    001 0 eng d  a9781558999909  a1558999906  aUMP00aMicroelectromechanical systems, materials and devices :bsymposium held November 26-28, 2007, Boston, Massachusetts, USA /ceditors by David A. LaVan ... [et al.]  aWarrendale, PA :bMaterials Research Society,cc2008  axiv, 325 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 1052  aIncludes bibliographical references and index 0aMicroelectromechanical systemsxMaterialsvCongresses 0aMicroelectromechanical systemsvCongresses1 aLaVan, David A. 0aMaterials Research Society symposium proceedings