TY  - BOOK
AU  - LaVan,David A.
TI  - Microelectromechanical systems, materials and devices: symposium held November 26-28, 2007, Boston, Massachusetts, USA 
T2  - Materials Research Society symposium proceedings
SN  - 9781558999909
PY  - 2008///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Microelectromechanical systems
KW  - Materials
KW  - Congresses
N1  - Includes bibliographical references and index
ER  -