Chemical-mechanical polishing--fundamentals and challenges :  symposium held April 5-7, 1999, San Francisco, California, U.S.A. / 
editors, S.V. Babu ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2000 
 - ix, 281 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 566 .
 - Materials Research Society symposia proceedings ;  v. 566 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558994737 1558994734 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrolytic polishing--Congresses<br/>Grinding and polishing--Congresses<br/>Chemical mechanical planarization--Congresses