TY  - BOOK
AU  - Babu,S.V.
TI  - Chemical-mechanical polishing--fundamentals and challenges: symposium held April 5-7, 1999, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558994737
PY  - 2000///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Electrolytic polishing
KW  - Congresses
KW  - Grinding and polishing
KW  - Chemical mechanical planarization
N1  - Includes bibliographical references and index
ER  -