Defects and diffusion in silicon processing :  symposium held April 1-4, 1997, San Francisco, California, U.S.A. / 
editors, Tomas Diaz de la Rubia ... [et al.] 
 - Pittsburgh, PA :  Materials Research Society,  1997 
 - xv, 541 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 469 .
 - Materials Research Society symposia proceedings ;  v. 469 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>978155899373 1558993738 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Defects--Congresses<br/>Semiconductor doping--Congresses<br/>Silicon crystals œx Defects--Congresses