01164nam a2200277 a 4500 vtls000060873 KUKTEM 20251125093652.0 120601t1997 pauao f 001 0 eng d 978155899373 1558993738 201304101301 huda 201206011130 safura UMP TK7871.85 .D44 1997 Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / editors, Tomas Diaz de la Rubia ... [et al.] Pittsburgh, PA : Materials Research Society, 1997 xv, 541 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 469 Includes bibliographical references and index Semiconductors Defects Congresses Semiconductor doping Congresses Silicon crystals œx Defects Congresses Diaz de la Rubia, Tomas Materials Research Society symposia proceedings ; v. 469 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7871.85 .D44 1997 0000068175 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 66948 66954 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992