TY  - BOOK
AU  - Diaz de la Rubia,Tomas
TI  - Defects and diffusion in silicon processing: symposium held April 1-4, 1997, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 978155899373
PY  - 1997///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Semiconductors
KW  - Defects
KW  - Congresses
KW  - Semiconductor doping
KW  - Silicon crystals œx Defects
N1  - Includes bibliographical references and index
ER  -