TY  - BOOK
AU  - Wong,Hei
TI  - Nano-CMOS gate dielectric engineering
SN  - 9781439849590
PY  - 2012///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Metal oxide semiconductors, Complementary
KW  - Design and construction
KW  - Dielectrics
KW  - Gate array circuits
KW  - Nanoelectronics
KW  - Materials
N1  - Includes bibliographical references and index
ER  -