Materials, integration and technology for monolithic instruments :  symposium held March 29-30, 2005, San Francisco, California, USA / 
editors: Jeremy A. Theil ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2005 
 - ix, 171 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 869 .
 - Materials Research Society symposia proceedings ;  v. 869 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558998230 1558998233 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Thin films--Congresses<br/>Metallic films--Congresses<br/>Metallizing--Congresses