01163nam a2200265 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245017800120260005600298300003300354490006300387504005200450650005600502650009200558650007800650650002700728650003100755650002800786700002100814830006200835vtls000062030KUKTEM20251125093706.0120615t2005    paudao f      001 0 eng d  a9781558998230  a1558998233  aUMP00aMaterials, integration and technology for monolithic instruments :bsymposium held March 29-30, 2005, San Francisco, California, USA /ceditors: Jeremy A. Theil ... [et al.]  aWarrendale, PA :bMaterials Research Society,c2005  aix, 171 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 869  aIncludes bibliographical references and indexes 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aTheil, Jeremy A. 0aMaterials Research Society symposia proceedings ;vv. 869