TY  - BOOK
AU  - Theil,Jeremy A.
TI  - Materials, integration and technology for monolithic instruments: symposium held March 29-30, 2005, San Francisco, California, USA 
T2  - Materials Research Society symposium proceedings
SN  - 9781558998230
PY  - 2005///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Thin films
KW  - Metallic films
KW  - Metallizing
N1  - Includes bibliographical references and indexes
ER  -