@book{67218,
	author = {Symposium GG, "Microelectromechanical systems--Materials and Devices II" and Vengallatore, Srikar and Materials Research Society.},
	title = {Microelectromechanical systems--materials and devices II :},
	publisher = {Materials Research Society,},
	year = {2009},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, PA :}
}