Microelectromechanical systems--materials and devices II :  symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. / 
editors, Srikar Vengallatore ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2009 
 - xi, 247 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 1139 .
 - Materials Research Society symposia proceedings ;  v. 1139 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605111117 1605111112 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Materials--Congresses<br/>Microelectromechanical systems--Congresses<br/>Thin films--Congresses<br/>Nanostructured materials--Congresses<br/>Silicon--Congresses