01506nam a2200325 4500 vtls000062118 KUKTEM 20251125093706.0 120618t2009 paudao f 001 0 eng d 9781605111117 1605111112 201304161542 huda 201304161541 huda 201206181030 safura UMP TK7875 .S96 2008 Symposium GG, "Microelectromechanical systems--Materials and Devices II" (2008 : Boston, Mass.) Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. / editors, Srikar Vengallatore ... [et al.] Warrendale, PA : Materials Research Society, 2009 xi, 247 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 1139 Includes bibliographical references and indexes Microelectromechanical systems Materials Congresses Microelectromechanical systems Congresses Thin films Congresses Nanostructured materials Congresses Silicon Congresses Vengallatore, Srikar Materials Research Society. Meeting œd (2008 : Boston, Mass.) Materials Research Society symposia proceedings ; v. 1139 0 0 0 0 10000 10000 2019-09-04 340.97 0 TK7875 .S96 2008 0000071760 2019-09-04 00:00:00 1 340.97 2019-09-04 OPEN VIRTUA40 67218 67224 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7100*8300*9992