TY  - BOOK
AU  - Vengallatore,Srikar
ED  - Symposium GG, "Microelectromechanical systems--Materials and Devices II"
ED  - Materials Research Society.
TI  - Microelectromechanical systems--materials and devices II: symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781605111117
PY  - 2009///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Microelectromechanical systems
KW  - Materials
KW  - Congresses
KW  - Thin films
KW  - Nanostructured materials
KW  - Silicon
N1  - Includes bibliographical references and indexes
ER  -