Gate stack and silicide issues in silicon processing II :  symposium held April 17-19, 2001, San Francisco, California, U.S.A. / 
editors, S.A. Campbell ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2002 
 - 1 v. (various pagings) :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 670 .
 - Materials Research Society symposia proceedings ;  v. 670 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558996069 1558996060 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Silicides--Congresses<br/>Gate array circuits--Congresses<br/>Electric leakage--Congresses