TY  - BOOK
AU  - Campbell,S.A.
TI  - Gate stack and silicide issues in silicon processing II: symposium held April 17-19, 2001, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558996069
PY  - 2002///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Congresses
KW  - Silicides
KW  - Gate array circuits
KW  - Electric leakage
N1  - Includes bibliographical references and indexes
ER  -