@book{67258,
	author = {Symposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology" and Merhari, Lhadi},
	title = {Nanopatterning--from ultralarge-scale integration to biotechnology :},
	publisher = {Materials Research Society,},
	year = {2002},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, Pa. :}
}