Nanopatterning--from ultralarge-scale integration to biotechnology :  symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. / 
editors, Lhadi Merhari ... [et al.] 
 - Warrendale, Pa. :  Materials Research Society,  2002 
 - xiii, 338 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 705 .
 - Materials Research Society symposium proceedings ;  v. 705 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558996410 1558996419 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanostructures--Congresses<br/>Nanotechnology--Congresses<br/>Microlithography--Congresses<br/>Integrated circuits--Ultra large scale integration--Congresses<br/>Biotechnology--Congresses