01410nam a2200313 a 4500 vtls000062237 KUKTEM 20251125093708.0 120618t2002 paua f 001 0 eng d 9781558996410 1558996419 201306071113 saini 201206181350 safura UMP QC176.8.N35 N366 2002 Symposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology" (2001 : Boston, Mass.) Nanopatterning--from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. / editors, Lhadi Merhari ... [et al.] Warrendale, Pa. : Materials Research Society, 2002 xiii, 338 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 705 Includes bibliographical references and index Nanostructures Congresses Nanotechnology Congresses Microlithography Congresses Integrated circuits Ultra large scale integration Congresses Biotechnology Congresses Merhari, Lhadi Materials Research Society symposium proceedings ; v. 705 0 0 0 0 10000 10000 2019-09-04 103.77 0 QC176.8.N35 N366 2002 0000073258 2019-09-04 00:00:00 1 103.77 2019-09-04 OPEN VIRTUA40 67258 67264 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992