TY  - BOOK
AU  - Merhari,Lhadi
ED  - Symposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology"
TI  - Nanopatterning--from ultralarge-scale integration to biotechnology: symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558996410
PY  - 2002///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Nanostructures
KW  - Congresses
KW  - Nanotechnology
KW  - Microlithography
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Biotechnology
N1  - Includes bibliographical references and index
ER  -