Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009 :  symposium held April 14-17, 2009, San Francisco, California, U.S.A. / 
editors, Martin Gall ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2009 
 - viii, 189 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 1156 .
 - Materials Research Society symposia proceedings ;  v. 1156 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605111292 1605111295 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Interconnects (Integrated circuit technology)--Congresses<br/>Integrated circuits--Very large scale integration--Congresses<br/>Microelectronics--Congresses<br/>Nanoelectronics--Congresses<br/>Materials--Congresses