TY  - BOOK
AU  - Gall,Martin
TI  - Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009: symposium held April 14-17, 2009, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781605111292
PY  - 2009///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Interconnects (Integrated circuit technology)
KW  - Congresses
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Microelectronics
KW  - Nanoelectronics
KW  - Materials
N1  - Includes bibliographical references and indexes
ER  -