Laser and particle-beam chemical processing for microelectronics :  symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / 
editors by Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko 
 - Pittsburgh, PA :  Materials Research Society,  c1988 
 - xv, 509 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 101 .
 - Materials Research Society symposia proceedings .
<br/><br/>Includes bibliographies references and index 
<br/><br/><label>ISBN: </label>9780931837692 0931837693 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction--Congresses<br/>Lasers--Industrial applications--Congresses<br/>Lasers in chemistry--Congresses