01047nam a2200253 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245020600120260005700326300003300383490006300416504004900479650006100528650004800589650003600637700002300673700002200696700002300718830005200741vtls000061833KUKTEM20251125093716.0120613t1988    paua   f b    001 0 eng d  a9780931837692  a0931837693  aUMP00aLaser and particle-beam chemical processing for microelectronics :bsymposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. /ceditors by Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko  aPittsburgh, PA :bMaterials Research Society,cc1988  axv, 509 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 101  aIncludes bibliographies references and index 0aIntegrated circuitsxDesign and constructionxCongresses 0aLasersxIndustrial applicationsxCongresses 0aLasers in chemistryxCongresses1 aEhrlich, Daniel J.1 aHigashi, Gregg S.1 aOprysko, Modest M. 0aMaterials Research Society symposia proceedings