TY  - BOOK
AU  - Ehrlich,Daniel J.
AU  - Higashi,Gregg S.
AU  - Oprysko,Modest M.
TI  - Laser and particle-beam chemical processing for microelectronics: symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9780931837692
PY  - 1988///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Design and construction
KW  - Congresses
KW  - Lasers
KW  - Industrial applications
KW  - Lasers in chemistry
N1  - Includes bibliographies references and index
ER  -