00994nam a2200241 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245017500120260005700295300003400352490006300386504005000449650005000499650003300549650003700582650004800619700002300667830006200690vtls000061975KUKTEM20251125093728.0120615t1997    paua   f      001 0 eng d  a9781558993426  a1558993428  aUMP00aMaterials modification and synthesis by ion beam processing :bsymposium held December 2-5, 1996, Boston, Massachusetts, U.S.A. /ceditors, Dale E. Alexander ... [et al.]  aPittsburgh, Pa. :bMaterials Research Society,c1997  axix, 727 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 438  aIncludes bibliographical references and index 0aMaterialsxEffect of radiation onvCongresses 0aIon implantationvCongresses 0aSemiconductor dopingvCongresses 0aSiliconxEffect of radiation onvCongresses1 aAlexander, Dale S. 0aMaterials Research Society symposia proceedings ;vv. 438