TY  - BOOK
AU  - Alexander,Dale S.
TI  - Materials modification and synthesis by ion beam processing: symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558993426
PY  - 1997///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Materials
KW  - Effect of radiation on
KW  - Congresses
KW  - Ion implantation
KW  - Semiconductor doping
KW  - Silicon
N1  - Includes bibliographical references and index
ER  -