Materials issues in vacuum microelectronics :  symposium held April 13-16, 1998, San Francisco, California, U.S.A. / 
editors, Wei Zhu ... [et al.] 
 - Warrendale, Pa. :  Materials Research Society,  1998 
 - xi, 207 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 509 .
 - Materials Research Society symposium proceedings ;  v. 509 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558994157 1558994157 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum microelectronics--Congresses<br/>Thin films--Congresses<br/>Field emission cathodes--Congresses<br/>Ion implantation--Congresses