TY  - BOOK
AU  - Zhu,Wei
TI  - Materials issues in vacuum microelectronics: symposium held April 13-16, 1998, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558994157
PY  - 1998///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Vacuum microelectronics
KW  - Congresses
KW  - Thin films
KW  - Field emission cathodes
KW  - Ion implantation
N1  - Includes bibliographical references and indexes
ER  -