Doping engineering for front-end processing :  symposium held March 25-27, 2008, San Francisco, California, U.S.A. / 
editors, B.J. Pawlak ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2008 
 - xi, 319 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 1070 .
 - Materials Research Society symposia proceedings ;  v. 1070 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605110400 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor doping--Congresses<br/>Semiconductor doping--Processing--Congresses<br/>Semiconductors--Materials--Congresses