00907nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079040000800097245015600105260005700261300003300318490006400351504005200415650003700467650004900504650004200553700003100595830006300626vtls000061056KUKTEM20251125093734.0120605t2008    pauda  f      001 0 eng d  a9781605110400  aUMP00aDoping engineering for front-end processing :bsymposium held March 25-27, 2008, San Francisco, California, U.S.A. /ceditors, B.J. Pawlak ... [et al.]  aWarrendale, PA :bMaterials Research Society,cc2008  axi, 319 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 1070  aIncludes bibliographical references and indexes 0aSemiconductor dopingvCongresses 0aSemiconductor dopingxProcessingvCongresses 0aSemiconductorsxMaterialsvCongresses1 aPawlak, B. J.q(Bartek J.) 0aMaterials Research Society symposia proceedings ;vv. 1070