TY  - BOOK
AU  - Pawlak,B.J.
TI  - Doping engineering for front-end processing: symposium held March 25-27, 2008, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781605110400
PY  - 2008///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Semiconductor doping
KW  - Congresses
KW  - Processing
KW  - Semiconductors
KW  - Materials
N1  - Includes bibliographical references and indexes
ER  -