Materials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors: Qinghuang Lin ... [et al.] - Warrendale, PA : Materials Research Society, 2007 - xiv, 338 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 990 . - Materials Research Society symposia proceedings ; v. 990 .

Includes bibliographical references and indexes

9781558999503 1558999507


Interconnects (Integrated circuit technology)--Congresses
Integrated circuits--Very large scale integration--Congresses
Microelectronics--Congresses
Nanoelectronics--Congresses
Materials--Congresses