01271nam a2200265 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112111015900120245022100279260005600500300003400556490006300590504005200653650006200705650006600767650003300833650003200866650002600898700001900924830006200943vtls000062047KUKTEM20251125093745.0120615t2007    paudao f      001 0 eng d  a9781558999503  a1558999507  aUMP2 aSymposium B, "Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics"d(2007 :cSan Francisco, Calif.)10aMaterials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics :bsymposium held April 10-12, 2007, San Francisco, California, U.S.A. /ceditors: Qinghuang Lin ... [et al.]  aWarrendale, PA :bMaterials Research Society,c2007  axiv, 338 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 990  aIncludes bibliographical references and indexes 0aInterconnects (Integrated circuit technology)vCongresses 0aIntegrated circuitsxVery large scale integrationvCongresses 0aMicroelectronicsvCongresses 0aNanoelectronicsvCongresses 0aMaterialsvCongresses1 aLin, Qinghuang 0aMaterials Research Society symposia proceedings ;vv. 990