Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 :  symposium held April 25-29, 2011, San Francisco, California, U.S.A. / 
editors, Mikhail R. Baklanov ... [et al.] 
 - New York :  Cambridge University Press,  2012 
 - ix, 127 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 1335 .
 - Materials Research Society symposia proceedings ;  v. 1335 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605113128 1605113123 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Interconnects (Integrated circuit technology)--Very large scale integration--Congressesv Congresses<br/>Microelectronics--Congresses<br/>Nanoelectronics--Congresses<br/>Materials--Congresses