TY  - BOOK
AU  - Atwater,Harry A.
TI  - Integration of heterogeneous thin-film materials and devices: symposium held April 23-24, 2003, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558997059
PY  - 2003///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Thin films
KW  - Congresses
KW  - Inhomogeneous materials
KW  - Thin film devices
KW  - Composite materials
N1  - Includes bibliographical references and indexes
ER  -