TY  - BOOK
AU  - Wagendristel,Alfred
AU  - Wang,Yu-ming
TI  - An introduction to physics and technology of thin films
SN  - 9789810216160
PY  - 1994///
CY  - Singapore
PB  - World Scientific
KW  - Thin films
KW  - Thin film devices
N1  - Includes bibliographical references and index
ER  -