Jones, T. B. <br/><br/>
Electromechanics and MEMS / 
Thomas B. Jones, Nenad G. Nenadic. 
 - New York :  Cambridge University Press,  2013 
 - xx, 559 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780521764834 0521764831 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems