TY  - BOOK
AU  - Jones,T.B.
AU  - Nenadic,Nenad G.
TI  - Electromechanics and MEMS
SN  - 9780521764834
PY  - 2013///
CY  - New York
PB  - Cambridge University Press
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -