Photon, beam, and plasma stimulated chemical processes at surfaces :  symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. / 
editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose 
 - Pittsburgh, Pa. :  Materials Research Society,  1987 
 - xix, 826 p. :  ill. ;  24 cm. 
 - Materials Research Society symposia proceedings,  v. 75  0272-9172 ; .
 - Materials Research Society symposia proceedings ;  v. 75 .
<br/><br/>Includes bibliographies and indexes 
<br/><br/><label>ISBN: </label>9780931837418 0931837413 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials--Effect of radiation on--Congresses<br/>Surface chemistry--Congresses<br/>Lasers--Industrial applications--Congresses<br/>Photon beams--Industrial applications--Congresses<br/>Plasma etching--Congresses