<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>01409nam a2200325 a 4500</leader>
  <controlfield tag="001">vtls000062492</controlfield>
  <controlfield tag="003">KUKTEM</controlfield>
  <controlfield tag="005">20251125093821.0</controlfield>
  <controlfield tag="008">120619t1987    paua   f      001 0 eng d</controlfield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">9780931837418</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">0931837413</subfield>
  </datafield>
  <datafield tag="039" ind1=" " ind2="9">
    <subfield code="a">201307091127</subfield>
    <subfield code="b">saini</subfield>
    <subfield code="y">201206191441</subfield>
    <subfield code="z">safura</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
    <subfield code="a">UMP</subfield>
  </datafield>
  <datafield tag="090" ind1=" " ind2=" ">
    <subfield code="a">TA418.6 .P46 1987</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="0">
    <subfield code="a">Photon, beam, and plasma stimulated chemical processes at surfaces :</subfield>
    <subfield code="b">symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. /</subfield>
    <subfield code="c">editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">Pittsburgh, Pa. :</subfield>
    <subfield code="b">Materials Research Society,</subfield>
    <subfield code="c">1987</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xix, 826 p. :</subfield>
    <subfield code="b">ill. ;</subfield>
    <subfield code="c">24 cm.</subfield>
  </datafield>
  <datafield tag="490" ind1="1" ind2=" ">
    <subfield code="a">Materials Research Society symposia proceedings,</subfield>
    <subfield code="x">0272-9172 ;</subfield>
    <subfield code="v">v. 75</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Includes bibliographies and indexes</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Materials</subfield>
    <subfield code="x">Effect of radiation on</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Surface chemistry</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Lasers</subfield>
    <subfield code="x">Industrial applications</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Photon beams</subfield>
    <subfield code="x">Industrial applications</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Plasma etching</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Donnelly, Vincent M.</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Herman, Irving P.</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Hirose, Masataka</subfield>
  </datafield>
  <datafield tag="830" ind1=" " ind2="0">
    <subfield code="a">Materials Research Society symposia proceedings ;</subfield>
    <subfield code="v">v. 75</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">0</subfield>
    <subfield code="a">20000</subfield>
    <subfield code="b">20000</subfield>
    <subfield code="d">2019-09-04</subfield>
    <subfield code="g">103.77</subfield>
    <subfield code="l">0</subfield>
    <subfield code="o">TA418.6 .P46 1987</subfield>
    <subfield code="p">0000075047</subfield>
    <subfield code="r">2019-09-04 00:00:00</subfield>
    <subfield code="t">1</subfield>
    <subfield code="v">103.77</subfield>
    <subfield code="w">2019-09-04</subfield>
    <subfield code="y">OPEN</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="a">VIRTUA40</subfield>
    <subfield code="c">68497</subfield>
    <subfield code="d">68503</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="a">VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7001*7002*8300*9992</subfield>
  </datafield>
</record>
