TY  - BOOK
AU  - Donnelly,Vincent M.
AU  - Herman,Irving P.
AU  - Hirose,Masataka
TI  - Photon, beam, and plasma stimulated chemical processes at surfaces: symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposia proceedings,
SN  - 9780931837418
PY  - 1987///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Materials
KW  - Effect of radiation on
KW  - Congresses
KW  - Surface chemistry
KW  - Lasers
KW  - Industrial applications
KW  - Photon beams
KW  - Plasma etching
N1  - Includes bibliographies and indexes
ER  -